Nitrogen Trifluoride – NF3, 7783-54-2

Nitrogen trifluoride or NF3 is a potent greenhouse gas used in the electronics industry for plasma etching and cleaning. It has a long atmospheric lifetime and contributes to climate change.

IUPAC NameNitrogen Trifluoride
Molecular FormulaNF3
CAS Number7783-54-2
SynonymsTrifluoramine, Nitrogen fluoride (NF3), Nitrogen fluoride (1:3), Nitrogen fluoride (NF3), Nitrogen fluoride (III), Nitrogen fluoride, compressed, UN 2451
InChIInChI=1S/F3N/c1-4(2)3
Nitrogen Trifluoride Molar Mass

The molar mass of NF3 is 71.0 g/mol. This means that one mole of NF3 contains 6.022 x 10^23 molecules.

Nitrogen Trifluoride Boiling Point

NF3 has a boiling point of -129.04 °C or -200.27 °F. This is relatively low compared to other gases, which makes it easier to handle in industrial applications.

Nitrogen Trifluoride Melting Point

Nitrogen Trifluoride has a melting point of -206.73 °C or -340.11 °F. This means that at room temperature, NF3 is in a gaseous state.

NF3 Density g/mL

The density of NF3 is 1.88 g/mL at standard temperature and pressure. This means that Nitrogen Trifluoride is denser than air and will sink to the ground if released into the atmosphere.

Nitrogen Trifluoride Molecular Weight

The molecular weight of NF3 is 71.0 g/mol. This is the sum of the atomic weights of nitrogen and fluorine in the compound.

Nitrogen Trifluoride
Nitrogen Trifluoride Structure

Nitrogen Trifluoride has a trigonal pyramidal molecular geometry with nitrogen as the central atom and three fluorine atoms surrounding it. The nitrogen-fluorine bond is polar covalent, with the fluorine atoms being more electronegative than nitrogen, leading to a partial negative charge on the fluorine atoms and a partial positive charge on the nitrogen atom.

Nitrogen Trifluoride Formula

The chemical formula for Nitrogen Trifluoride is NF3, indicating that one molecule of NF3 contains one nitrogen atom and three fluorine atoms.

AppearanceColorless gas
Specific Gravity2.62
ColorColorless
OdorOdorless
Molar Mass71.0 g/mol
Density1.88 g/mL at STP
Melting Point-206.73 °C or -340.11 °F
Boiling Point-129.04 °C or -200.27 °F
Flash PointNot applicable
Water Solubility0.41 g/100 mL at 25 °C
SolubilitySoluble in organic solvents
Vapour Pressure315 kPa at 20 °C
Vapour Density2.01 (air = 1)
pKaNot applicable
pHNot applicable
Nitrogen Trifluoride Safety and Hazards

Nitrogen Trifluoride (NF3) is generally considered safe if handled properly, but it can pose several hazards if mishandled. It can cause skin and eye irritation, and inhalation of high concentrations can cause respiratory distress. NF3 gas can displace oxygen in poorly ventilated areas, leading to asphyxiation. It is also a potent greenhouse gas and contributes to climate change. In the case of a fire, NF3 can release toxic hydrogen fluoride gas. It is essential to follow proper safety protocols, including proper ventilation and the use of protective equipment, when handling NF3 to avoid these hazards.

Hazard SymbolsT, C
Safety DescriptionAvoid inhalation and skin/eye contact. Use only in well-ventilated areas.
UN IDsUN2451
HS Code28129090
Hazard Class2.3
Packing GroupII
ToxicityHighly toxic
Nitrogen Trifluoride Synthesis Methods

Several methods exist for synthesizing Nitrogen Trifluoride (NF3):

One common method involves the reaction of anhydrous ammonia (NH3) with fluorine gas (F2) in the presence of a catalyst such as iron, nickel, or platinum. The reaction produces NF3 and hydrogen fluoride (HF) gas. Industries commonly use this method for the production of NF3.

Another method involves the thermal decomposition of ammonium fluoride (NH4F) at high temperatures. The reaction produces NF3 and ammonia gas (NH3). The reaction of NH3 with F2 is more efficient than this method, so it is less commonly used.

Another method involves the reaction of nitric oxide (NO) with fluorine gas in the presence of a catalyst. The reaction produces NF3 and nitrogen dioxide (NO2) gases.

One can also electrochemically synthesize NF3 by passing an electric discharge through a mixture of N2 and F2 gases. The resulting plasma forms NF3 and other nitrogen-fluorine compounds.

Regardless of the method used, it is crucial to handle the highly reactive and potentially hazardous reagents with appropriate safety precautions. However, researchers must carefully control the synthesis process to guarantee a high yield and purity of the end product.

Nitrogen Trifluoride Uses

Nitrogen Trifluoride (NF3) has various industrial applications due to its unique properties.

  • The semiconductor industry uses NF3 as a cleaning agent for silicon wafers. NF3 is also utilized in the production of flat panel displays, solar cells, and microelectromechanical systems (MEMS).
  • Electronic component manufacturing employs NF3 as a plasma etching gas. It exhibits high reactivity and selectively removes certain materials while leaving others intact.
  • Cooling systems also use NF3 as a refrigerant due to its lower global warming potential compared to other refrigerants, making it a more environmentally friendly option.
  • The aerospace industry employs NF3 as a propellant due to its high specific impulse, which allows for efficient propulsion of spacecraft.

Despite its many uses, there are concerns regarding the environmental impact of NF3. It is a potent greenhouse gas and has a long atmospheric lifetime. The production and use of NF3 can contribute to climate change if proper precautions are not taken. As such, efforts are being made to reduce its use and develop more sustainable alternatives.

Questions:
Q: Is nitrogen trifluoride (NF3) polar?

A: Yes, NF3 is polar. It has a trigonal pyramidal molecular geometry, with the nitrogen atom at the center and three fluorine atoms arranged around it. The molecule’s asymmetrical shape causes an unequal distribution of electron density, resulting in a polar molecule.

Q: What is the formula for nitrogen trifluoride?

A: The formula for nitrogen trifluoride is NF3, indicating that the molecule consists of one nitrogen atom and three fluorine atoms.

Q: Where does nitrogen trifluoride come from?

A: NF3 can be produced through various methods, including the reaction of anhydrous ammonia with fluorine gas, thermal decomposition of ammonium fluoride, and electrochemical synthesis. It is commonly used in the semiconductor industry as a cleaning agent and in the manufacturing of electronic components and aerospace propellants.

Q: Nitrogen trifluoride Lewis structure?

A: The Lewis structure for NF3 consists of one nitrogen atom bonded to three fluorine atoms through single covalent bonds. There is also a lone pair of electrons on the nitrogen atom, giving the molecule a trigonal pyramidal shape.

Q: Nitrogen trifluoride intermolecular forces?

A: The intermolecular forces of NF3 include dipole-dipole interactions, which result from the molecule’s polar nature. The molecule also experiences London dispersion forces, which are weak intermolecular forces that arise from temporary fluctuations in electron density.

Q: Is NF3 polar or nonpolar?

A: NF3 is polar due to its asymmetrical shape and unequal distribution of electron density. The molecule has a dipole moment, indicating that it has a positive and negative end, making it a polar molecule.