Nitrogen fluoride is a highly reactive chemical compound composed of nitrogen and fluorine. It is used in the semiconductor industry for plasma etching and cleaning processes.
| IUPAC Name | Nitrogen fluoride |
| Molecular Formula | NF |
| CAS Number | 13967-06-1 |
| Synonyms | Nitrogen monofluoride, Nitrogen(II) fluoride, Nitrogen fluoride (NF), UN 2451, EINECS 232-013-4 |
| InChI | InChI=1S/FN/c1-2 |
Nitrogen Fluoride molar mass
The molar mass of nitrogen fluoride (NF) is 33.005 g/mol. It is a light, colorless gas that is highly reactive due to the electronegativity difference between nitrogen and fluorine. Its molar mass is derived from the atomic masses of nitrogen and fluorine, which are 14.007 g/mol and 18.998 g/mol, respectively. The small size of the molecule makes it an ideal candidate for use in the semiconductor industry, where it is used for plasma etching and cleaning processes.
Nitrogen Fluoride boiling point
Nitrogen fluoride has a boiling point of -129.6 °C (-201.3 °F). At this temperature, it transitions from a gas to a liquid state. Nitrogen fluoride has a low boiling point due to its weak intermolecular forces, which are primarily van der Waals forces. This low boiling point makes it a volatile and highly reactive compound that must be handled with care.
Nitrogen Fluoride melting point
Nitrogen fluoride has a melting point of -206.5 °C (-339.7 °F). At this temperature, it transitions from a solid to a liquid state. The low melting point is due to the weak intermolecular forces between molecules, which are primarily van der Waals forces. Nitrogen fluoride’s low melting point also makes it highly reactive and volatile.
Nitrogen Fluoride density g/ml
The density of nitrogen fluoride is 1.49 g/mL at standard temperature and pressure (STP). This density is relatively high compared to other gases due to the small size of the molecule and the presence of two atoms. Nitrogen fluoride’s high density makes it an ideal candidate for use in the semiconductor industry, where it is used for plasma etching and cleaning processes.
Nitrogen Fluoride molecular weight
The molecular weight of nitrogen fluoride is 33.005 g/mol. This value is derived from the sum of the atomic masses of nitrogen and fluorine, which are 14.007 g/mol and 18.998 g/mol, respectively. The small size of the molecule and its relatively low molecular weight make it an ideal candidate for use in the semiconductor industry.
Nitrogen Fluoride Structure
NF has a linear molecular structure, with the nitrogen atom in the center and the fluorine atom at either end. The bond between the nitrogen and fluorine atoms is a covalent bond, and the molecule has a polar nature due to the electronegativity difference between the two atoms. The molecule has a dipole moment, which makes it highly reactive and prone to forming chemical bonds with other molecules.
Nitrogen Fluoride formula
The chemical formula for nitrogen fluoride is NF. This formula indicates that the molecule is composed of one nitrogen atom and one fluorine atom. The molecule has a linear structure and a polar nature due to the electronegativity difference between the two atoms. The NF formula is commonly used in the semiconductor industry, where it is used for plasma etching and cleaning processes.
| Appearance | Colorless gas or pale yellow liquid |
| Specific Gravity | 1.49 (at STP) |
| Color | Colorless |
| Odor | Pungent |
| Molar Mass | 33.005 g/mol |
| Density | 1.49 g/mL (at STP) |
| Melting Point | -206.5 °C (-339.7 °F) |
| Boiling Point | -129.6 °C (-201.3 °F) |
| Flash Point | Not applicable |
| Water Solubility | Reacts with water |
| Solubility | Soluble in organic solvents |
| Vapour Pressure | 298.5 kPa at 25 °C |
| Vapour Density | 1.44 (air = 1) |
| pKa | Not applicable |
| pH | Not applicable |
Nitrogen Fluoride Safety and Hazards
Nitrogen fluoride (NF) poses a significant safety risk due to its highly reactive and toxic nature. Exposure to NF can cause severe burns and irritation to the skin, eyes, and respiratory tract. NF is a potent oxidizer and can ignite or explode in contact with organic materials, such as clothing, paper, or wood. In addition, it can react violently with water and other chemicals, releasing toxic fumes and gases. Appropriate safety measures, including the use of protective clothing, respiratory protection, and proper handling and storage procedures, should be implemented when working with NF to minimize the risk of exposure and injury.
| Hazard Symbols | Oxidizer |
| Safety Description | Keep away from combustible materials, heat, sparks, and open flames. |
| Wear protective clothing, gloves, and eye/face protection. | |
| In case of fire, use water, dry chemical, or carbon dioxide extinguishers. | |
| UN Ids | UN2468 (for gas), UN3263 (for liquid) |
| HS Code | 2811.22.00 |
| Hazard Class | 5.1 (oxidizing substances) |
| Packing Group | II (for gas), III (for liquid) |
| Toxicity | NF is highly toxic and can cause severe burns and irritation to the skin, eyes, |
| and respiratory tract. Ingestion or inhalation can be fatal. |
Nitrogen Fluoride Synthesis Methods
In the production of nitrogen monofluoride, the abstraction of a fluorine atom from nitrogen difluoride (NF2) by radical species (H, O, N, CH3) efficiently generates a radical for long-lasting chain propagation. However, the end product contains radical impurities that catalyze its decomposition.
To obtain a purer product, one can use the less-efficient but more pure technique of azide decomposition. This involves the shock-induced decomposition of fluorine azide, which can be formed in situ by reacting atomic fluorine with hydrazoic acid, into NF and N2.
During NF production, it is important to implement appropriate safety measures, including using proper equipment and protective clothing, and ensuring proper ventilation to minimize exposure to hazardous materials and chemicals.
Nitrogen Fluoride Uses
Nitrogen fluoride (NF) has several applications across various industries.
NF finds primary use as a fluorinating agent in depositing thin films of silicon nitride and other materials onto surfaces in the production of semiconductors and electronics.
The aerospace industry uses NF as a rocket propellant due to its high oxidizing power and low molecular weight, making it an efficient fuel. It also serves as an additive in rocket fuel to enhance combustion and increase thrust.
In the medical industry, NF plays a role in the synthesis of certain pharmaceuticals and laboratory experiments as a reagent. Additionally, it serves as a sterilizing agent for medical equipment due to its strong oxidizing properties.
Specialty glass and ceramics production utilizes NF as a fluxing agent to lower the melting point of the material and enhance its properties.
However, the highly reactive and toxic nature of NF poses significant safety risks. Therefore, it is important to implement appropriate safety measures, including the use of protective equipment and proper handling procedures when working with NF, to minimize the risk of exposure and injury.